VSP-G1 Operating and maintenance guide

Warning: Important points to remember when conducting maintenance activities involving disassembly and reassembly: Turn off the spark generator and disconnect it from the power supply; Transport the reactor assembly with the transport plate and open it in a safe environment; Do not apply pressure when wiping the surface; The coating on the viewport filter screens electromagnetic radiation. Do not scratch the coating, nor replace it with a different type; Dry all surfaces before reassembly; Retract the electrodes sufficiently to avoid collision with each other; and Screw down both alignment pins.

Reactor assembly

Assembling the reactor

1. Place the Mount tool and clean reactor parts on a clean workspace.
2. Place the left endcap on the mount tool, making sure to align the alignment marks.
3. Place and tighten the left mounting pin.
4. Place a clamp on the mount tool, with the handle side under the endcap.
5. Place an O-ring onto the end cap and keep it in place with the reactor housing. While holding the reactor housing, close the clamp.
6. Repeat steps 5 and 6, sliding the right endcap into place.
7. Test the assembly by slightly tightening the right mounting pin. The right endcap base should be flush with the mount tool. If the right endcap base is not flush with the mount tool, open the right clamp, tighten the right mounting pin, and close the clamp again.

Mounting the reactor assembly

1. Assemble the reactor (See Assembling the reactor).
2. Place the mount plate with the reactor close to the base unit.
3. Remove the mounting pins.
4. Lift the reactor.
5. Align the marks on the reactor with the marks on the base unit.
6. Gently lower the reactor; it should slide into place.
7. Check if the reactor is fully lowered. Press down gently on both sides if necessary.
8. Use the mounting pins to secure the reactor to the base unit.
9. The reactor is correctly mounted if clearing the interlock removes the Interlock 9 error from the display.

Unmounting the reactor assembly

1. Switch off spark and flush the system.
2. Stop gas flow and depressurize.
3. Select "Change electrodes" in the menu.
4. Unscrew the alignment pins.
5. Lift the reactor and transfer it mount plate. Secure the reactor to the mount plate with the mounting pins.

Disassembling and cleaning the reactor

1. Move mounting plate with the reactor to an environment where risk of particle exposure is limited, such as a fume hood or glove box.
2. Open and remove the right clamp. Remove the right end-cap and O-right by sliding them to the right. image
3. Gently wipe the surfaces of the right endcap and the O-ring with a cleaning cloth/wipe, moistened with ethanol, water, or IPA. Use a moistened cotton tip to clean inside tubing. image
4. Open and remove the left clamp. Remove the reactor housing and O-right by sliding them to the right. image
5. Gently wipe the surfaces of the reactor housing, left endcap and the O-ring with a cleaning cloth/wipe, moistened with ethanol, water, or IPA. Use a moistened cotton tip to clean inside tubing. image
6. Dry the endcaps, reactor housing and O-rings using filtered pressurized air or a dry cloth. No visible trace of solvent should remain.
7. Assemble the reactor.

Replacing electrodes

1. Unmount the reactor.
2. Disassemble and clean the reactor.
3. Unscrew the cleaned electrode tips. image
4. Screw in the replacement electrode tips.
5. Assemble the reactor.
6. Mount the reactor.

Periodic maintenance

It is necessary to periodically clean the left insulator, which is normally left in the fully retracted position when removing the endcap for any reason already described in this manual. If there is too much particle build-up in the reactor there is a risk of electrical damage to the VSP-G1 unit. To clean the hidden insulator surface, the electrode position can be adjusted by turning the gear on the underside of the endcap. image Ensure that all surfaces are dry before reassembly.

Other periodic maintenance includes replacing the filters and the fuses.

Cleaning the viewport:

1. Stop gas flow and depressurise.
2. Select "remove reactor" in the menu.
3. Switch off the mains supply and unplug.
4. Unscrew the alignment pins, remove the reactor from the mount plate and place on the transport plate, screwing in the alignment pins to the transport plate.
5. Move reactor and transport tool to an environment where particle exposure is limited, such as a fume hood or glove box.
6. Holding the viewport with one hand, loosen and remove the clamp. image
7. Remove the viewport and the O-ring. image
8. Wipe the inner surface with a cleaning cloth/wipe. A solvent (ethanol, water, IPA, etc) can be used. Use a (moistened) cotton tip to clean inside tubing. Do not apply too much pressure, as the inside of the viewport window is coated with a delicate coating. image
9. Once the surfaces are dry, mount the O-ring back onto the reactor housing, followed by the viewport. image
10. Holding the viewport in place with one hand, attach and tighten the clamp with the other. image
11. Remove the reactor from the transport plate and remount onto the mount plate, tightening the alignment pins.

To replace the filter(s) and dispose them

This procedure is entirely dependent on your particular setup and deposition system, but we highly recommend the use of a HEPA filter or one of higher quality. Particle filters are characterized by a drop in filtration efficiency for particles between approximately 100 and 300 nm. For particles smaller than 20nm as generated by the spark generator, filter efficiency is typically >99.99%. Dispose the filters depending on your local disposal guidelines and any particular requirements outlined by the filtration system you choose for your setup.

To replace the fuse

The fuseholder, located on the back of the base unit between the power switch and the mains supply plug, accepts 5x20mm T2.5A/250V fuses. Before replacing the fuse, be sure to shut down the system and unplug it from the power supply.